High-Purity Liquid Filtration for Microelectronics Manufacturing
Purity and precision guaranteed in every drop. Advanced filtration solutions to protect your yield and product quality.
The Importance of Precision Filtration
Microelectronics manufacturing requires ultrapure process fluids to maintain yield, protect wafers, and ensure process stability. Liquid filtration plays a critical role in preventing particulate contamination at every stage—from plating to DI water.
Applications in Microelectronics
DI Water Polishing
Filtration of deionized water before the final rinse to ensure maximum purity.
Plating Chemical Filtration
Removing particles from critical plating chemicals such as Sn, Ni, and Au to protect layer integrity.
Photoresist & Etchant Filtration
Ensuring photoresist, developer, and etching solutions remain free from contaminants for precise lithography.
CMP Slurry Ultrafiltration
Maintaining CMP slurry stability by removing disruptive particles and ensuring consistent polishing performance.
CMP Bath Integrity
Preserving CMP bath cleanliness and preventing cross-contamination to extend bath life and process reliability.
Critical Considerations:
Micron Rating
A precise rating choice from 0.1 µm to 5 µm absolute is crucial for capturing the smallest particles.
Low Extractables Media
Ensuring the filter does not release contaminants into the fluid being filtered.
High Chemical Compatibility
Materials like PVDF and PTFE ensure the filter does not react with aggressive chemicals.
High Surface Area Cartridges
For extended service life, reducing replacement frequency and operational costs.
Commitment to Purity
Microelectronics manufacturing depends on precision-grade liquid filtration to control defect rates and maintain purity. Selecting the right filter ensures both performance and compliance with industry cleanliness standards.
Explore Our Filtration Solutions by Industry
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Food & Beverage (F&B) Filtration
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